Department of Physics, Tongren University, Tongren Guizhou 554300, China;2.School of Materials Science andEngineering, X'an Jiaotong University, Xi'an Shaanxi 710049, China
Abstract: Accurate measurement of micro-displacements holds significant importance in precisionmanufacturing, micro-nano processing, and physics experimental teaching. However, traditional high-precisiondisplacement measurement systems often rely on expensive interferometers or specialized industrial gratingrulers, which are complex in structure and costly, making them difficult to widely adopt in undergraduateexperimental teaching. Based on the principle of linear optical grating encoding, this paper designs andconstructs a micro-displacement measurement experimental setup suitable for university physics experimentalteaching. The setup utilizes the A-and B-phase quadrature signals output by the grating sensor, employs afourfold frequency subdivision counting method to significantly improve measurement resolution, and achievesreal-time displacement measurement and display through pulse counting. Taking a 180 LPI grating strip as anexample, the theoretical displacement resolution of the system can reach 35.28 um. Experimental results showthat the setup exhibits good linearity within a small range ( correlation coefficient R>0.999),with repeatedmeasurement errors better than 40 um. This experimental setup features an intuitive structure, clear principles,and low cost, along with good repeatability and scalability, making it suitable for promotion and use inuniversity physics experiments and related courses.
佘彦超 , 张 杰 , 李 勇 , 罗开武 , 李 平 . 基于光栅编码与四倍频细分技术的微小位移测量实验装置设计#br#[J]. 大学物理实验, 2026, 39(4): 49-56.
SHE Yanchao, ZHANG Jie, LI Yong, LUO Kaiwu, LI Ping. Design of an Experimental Device for Micro-displacement MeasurementBased on Grating Encoding and QuadrupleFrequency Subdivision Technology. Physical Experiment of College, 2026, 39(4): 49-56.
