基于光纤法布里-珀罗干涉的微小位移测量系统设计与实验研究#br#

doi:10．14139/j．cnki．cn22－1228．2026．03．001

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摘要本文设计并搭建了一套基于光纤法布里-珀罗( F-P) 干涉原理的微小位移测量系统。该系统由 ASE 宽谱光源、光纤环形器、自制的 F-P 传感探头、波分复用器( AWG) 、光电转换模块、数据采集卡及自主开发的 LabVIEW 解调程序构成。通过解调干涉光谱相邻波谷的波长差，反演 F-P 腔的腔长变化量，从而实现对微小位移的绝对测量。实验结果表明: 该系统在 50～500 μm 测量范围内线性度良好，测量值与理论值的线性拟合斜率接近 1( 0．995 89) ，决定系数Ｒ 2 达 0．999 966。通过分析系统在不同初始腔长的稳定性与重复测量一致性可知，选择合适的 F-P 腔初始腔长位置，能有效提高系统的测量精度。

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关键词: 光纤传感法布里-珀罗干涉微小位移测量

Abstract: In this paper，a microdisplacement measurement system based on the fiberoptic Fabry-Perot( FP) interference principle is designed and implemented．The system comprises an ASE broadband light source，a fiber optic circulator，a custommade FP sensing probe，an arrayed waveguide grating( AWG) multiplexer，a photoelectric conversion module，a data acquisition card，and a selfdeveloped LabVIEW demodulation program．By demodulating the wavelength difference between adjacent interference dips，the change in the FP cavity length is retrieved，thereby enabling absolute measurement of microdisplacement． Experimental results demonstrate that the system exhibits excellent linearity within the measurement range of 50～500 μm，with a linearfitting slope between measured and theoretical values close to unity( 0．995 89) and a coefficient of determination Ｒ 2 as high as 0．999 966．Analysis of the system stability under different initial cavity lengths and the repeatability of measurements reveals that selecting an appropriate initial cavity length can effectively improve the measurement accuracy of the system．

Key words: optical fiber sensing fabry-perot interference micro-displacement measurement

发布日期: 2026-06-25

ZTFLH:
	O 436．1

基金资助: 国家自然科学基金委青年基金项目( 12305239) ; 重庆理工大学科研启动基金资助项目( 2023ZDZ053) ; 重庆理工大学2024 年度本科教育教学改革研究项目( 2024YB75)

引用本文:

程时葵, 粱鹏. 基于光纤法布里-珀罗干涉的微小位移测量系统设计与实验研究#br#[J]. 大学物理实验, 2026, 39(3): 1-5.
CHENG Shikui, LIANG Peng. Design and Experimental Ｒesearch of a Micro-Displacement Measurement System Based on Optical Fiber Fabry-Perot Interference#br#. Physical Experiment of College, 2026, 39(3): 1-5.

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https://dawushiyan.jlict.edu.cn/CN/10．14139/j．cnki．cn22－1228．2026．03．001 或 https://dawushiyan.jlict.edu.cn/CN/Y2026/V39/I3/1

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